Laser damage characteristics of indium-tin-oxide film and polyimide film

Abstract This report focuses on the damage characteristics of the indium-tin-oxide (ITO) layer and the polyimide (PI) layer, which are two constituent components of a LCD. This investigation is different from the previous study, in which the alignment layer was deposited directly on a glass substrate. The PI alignment layer is pinned on the ITO film to imitate the structure of the LCD as much as possible in our current study. The damage process of the ITO/Glass sample involves melting, vaporization near the laser-induced damage threshold (LIDT), and removal at a higher fluence. However, the damage process of the PI/ITO/Glass sample involves thermally induced plastic deformation, followed by cooling when the irradiation fluence is near the LIDT, and rupture when the irradiation fluence is higher. The LIDTs of the PI/ITO/Glass samples, as determined by the on-line CCD detection technique, are higher than those of the ITO/Glass samples. The favorable mechanical properties of the PI are primarily responsible for this result.

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