ANFIS and SA Based Approach to Prediction, Scheduling, and Performance Evaluation for Semiconductor Wafer Fabrication

[Cao Zhengcai; Zhao Huidan] Beijing Univ Chem Technol, Coll Informat Sci & Technol, Beijing 100029, Peoples R China. [Cao Zhengcai] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710054, Peoples R China. [Wang Yongji] Chinese Acad Sci, Inst Software, State Key Lab Comp Sci, Beijing 100190, Peoples R China.