Characterization of Si nanowaveguide line edge roughness and its effect on light transmission
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Steffen Marschmeyer | Lars Zimmermann | G. Winzer | O. Fursenko | L. Zimmermann | G. Winzer | O. Fursenko | S. Marschmeyer | J. Bauer | A. Knopf | J. Bauer | A. Knopf
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