A new XRF spectrometer based on a ring-shaped multi-element Silicon Drift Detector and on X-ray capillary optics

This paper describes an innovative X-ray Fluorescence spectrometer specifically designed to reach high performances in terms of energy resolution, position resolution and detection rate in elemental mapping applications. The spectrometer is characterized by several novelty contents. In particular, it is based on a ring-shaped monolithic array of Silicon Drift Detectors with a hole cut in its center. In this way a coaxial X-ray excitation beam can reach the sample, allowing to obtain a particular geometry that optimizes the solid angle for the collection of the X-ray fluorescence. Moreover, the X-ray beam is collimated on the sample by means of capillary optics in order to obtain high photon density in a small excitation spot. Detector, optics and generator are assembled in a compact vacuum tightened unit. The paper describes the structure of this spectrometer and presents the first experimental results obtained with the XRF spectrometer.