Application of Taguchi robust design method to SAW mass sensing device

It is essential that measurement systems provide an accurate and robust performance over a wide range of input conditions. This paper adopts Taguchi's signal-to-noise ratio (SNR) analysis to develop a robust design for the Rayleigh surface acoustic wave (SAW) gas sensing device operated in a conventional delay-line configuration. The goal of the present Taguchi design activity is to increase the sensitivity of this sensor while simultaneously reducing its variability. A time- and cost-efficient finite-element analysis method is used to investigate the effects on the sensor's response output of variations in the carbon dioxide (CO/sub 2/) gas deposited mass. The simulation results for the resonant frequency and wave mode analysis are all shown to be in good agreement with the values predicted theoretically.

[1]  Michael J. Vellekoop,et al.  Acoustic-wave based monolithic microsensors , 1994, 1994 Proceedings of IEEE Ultrasonics Symposium.

[2]  J. Schoberl,et al.  Accurate FEM/BEM-simulation of surface acoustic wave filters , 2003, IEEE Symposium on Ultrasonics, 2003.

[3]  Qingji Xie,et al.  Impedance analysis for the investigation of the behaviors of piezoelectric quartz crystal in the liquid at harmonic resonance , 2000 .

[4]  Stephanus Büttgenbach,et al.  Electrical characterisation of high-frequency thickness-shear-mode resonators by impedance analysis , 2001 .

[5]  Yuin Wu,et al.  Taguchi Methods for Robust Design , 2000 .

[6]  T. Pastureaud,et al.  A mixed FEM/BEM model to characterize surface waves on multilayer substrate , 1999, 1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027).

[7]  Anton Mauder,et al.  SAW gas sensors: comparison between delay line and two port resonator , 1995 .

[8]  E. Verona,et al.  New properties of SAW gas sensing , 1998, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[9]  Philip L. Marston,et al.  Principles of Acoustic Devices by Velimir M. Ristic , 1984 .

[10]  B. Auld,et al.  Acoustic fields and waves in solids , 1973 .

[11]  E. Verona,et al.  New capabilities for optimizing SAW gas sensors , 2001, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[12]  Der Ho Wu,et al.  Robust design of quartz crystal microbalance using finite element and Taguchi method , 2003 .

[13]  William Y. Fowlkes,et al.  Engineering Methods for Robust Product Design: Using Taguchi Methods in Technology and Product Development , 1995 .

[14]  Shigeyoshi Goka,et al.  Fundamental study on multi-mode quartz crystal gas sensors , 1999, 1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027).

[15]  L. N. Harris,et al.  Taguchi techniques for quality engineering, Philip J. Ross, Mcgraw-hill book company, 1988 , 1989 .

[16]  Madhan Shridhar Phadke,et al.  Quality Engineering Using Robust Design , 1989 .

[17]  Oliver Nagler,et al.  Efficient design and optimization of MEMS by integrating commercial simulation tools , 1998 .

[18]  S. Ballandras,et al.  Precise modeling of complex SAW structures using a perturbation method hybridized with a finite element analysis , 1998, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[19]  Michael J. Vellekoop,et al.  Acoustic wave sensors and their technology , 1998 .

[20]  M. Penza,et al.  A study of SAW gas sensing versus gas concentration , 1999, 1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027).