Transfer of self-aligned spacer patterns for single-digit nanofabrication
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Lei Wan | Ricardo Ruiz | He Gao | G. Doerk | T. Albrecht | R. Ruiz | L. Wan | Y. Chapuis | J. Lille | K. Patel | Gregory S Doerk | Jeff Lille | K C Patel | Yves-Andre Chapuis | Thomas R Albrecht | H. Gao
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