Forced Oscillations of Microelectromechanical Resonators

Forced oscillations of micromechanical resonators fabricated as clamped-clamped composite structures are studied in this effort. Piezoelectric actuation is used to excite these structures on the input side and piezoelectric sensing is carried out on the output side. Each resonator structure is modeled as a beam with stepwise properties and a distributed actuation. For weak damping and weak forcing, a nonlinear analysis is conducted to obtain an approximate solution of the system. In this analysis, the method of multiple scales is used on the governing partial differential system and a solution is sought to describe oscillations about a buckled position. The different modeling assumptions made are presented and discussed.Copyright © 2003 by ASME