A novel capacitive accelerometer with a highly symmetrical double-sided beam-mass structure

This paper reports a novel capacitive accelerometer with highly symmetrical double-sided beam-mass structure. The highly symmetrical structure is fabricated from single wafer by a novel vertical sidewall protection technique. The good device performance i

[1]  Jonathan J. Bernstein,et al.  Low-noise MEMS vibration sensor for geophysical applications , 1999 .

[2]  Xiaowei Liu,et al.  Z-axis Capacitive Accelerometer with novel beams using SOG Structure , 2006, 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems.

[3]  W. Sansen,et al.  A highly symmetrical capacitive micro-accelerometer with single degree-of-freedom response , 1992 .

[4]  H. Riedel,et al.  Capacitive silicon accelerometer with highly symmetrical design , 1990 .

[5]  Kyo-Il Lee,et al.  Development and analysis of the vertical capacitive accelerometer , 2005 .

[6]  Young-Ho Cho,et al.  Self-balanced navigation-grade capacitive microaccelerometers using branched finger electrodes and their performance for varying sense voltage and pressure , 2003 .

[7]  F. Ayazi,et al.  Sub-Micro-Gravity In-Plane Accelerometers With Reduced Capacitive Gaps and Extra Seismic Mass , 2007, Journal of Microelectromechanical Systems.

[8]  K. Najafi,et al.  An all-silicon single-wafer micro-g accelerometer with a combined surface and bulk micromachining process , 2000, Journal of Microelectromechanical Systems.

[9]  Yuelin Wang,et al.  Single wafer fabrication of a symmetric double-sided beam–mass structure using DRIE and wet etching by a novel vertical sidewall protection technique , 2010 .

[10]  Gang Li,et al.  Design and fabrication of a highly symmetrical capacitive triaxial accelerometer , 2001 .

[11]  Weileun Fang,et al.  On the sensitivity improvement of CMOS capacitive accelerometer , 2008 .

[12]  Min-Hang Bao,et al.  Micro Mechanical Transducers: Pressure Sensors, Accelerometers and Gyroscopes , 2000 .