Role of sidewall scattering in feature profile evolution during Cl2 and HBr plasma etching of silicon
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M. V. Malyshev | D. B. Graves | Vincent M. Donnelly | V. M. Donnelly | Fred P. Klemens | J. T. C. Lee | F. Klemens | D. Graves | J. T. Lee | M. A. Vyvoda | H. Lee | M. Li | M. Li | M. Vyvoda | H. Lee
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