Micro-power wireless transmitter for MEMS sensing and communication applications

A micro-power tunnel-diode-based LC-tuned oscillator architecture is proposed for MEMS sensing and wireless data transmission applications. The prototype sensing and transmitting module employs a MEMS capacitive pressure sensor performing pressure to frequency conversion and a miniature on-board loop serving as the inductor for the LC tank and also a transmitting antenna. The system achieves a reliable telemetry performance over a distance of three meters with a total power consumption of 65 /spl mu/W.

[1]  S. Chatzandroulis,et al.  A miniature pressure system with a capacitive sensor and a passive telemetry link for use in implantable applications , 2000, Journal of Microelectromechanical Systems.

[2]  Mark G. Allen,et al.  High Temperature Characterization of Ceramic Pressue Sensors , 2001 .

[3]  C. Hierold,et al.  Implantable low power integrated pressure sensor system for minimal invasive telemetric patient monitoring , 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.

[4]  Qiuting Huang,et al.  A 0.5mW passive telemetry IC for biomedical applications , 1998, Proceedings of the 23rd European Solid-State Circuits Conference.

[5]  Zhiqun Li,et al.  Converters dedicated to long-term monitoring of strain gauge transducers , 1997 .

[6]  Wen H. Ko,et al.  Touch mode capacitive pressure sensors , 1999 .

[7]  K.-L. Krieger,et al.  A new passive CMOS telemetry chip to receive power and transmit data for a wide range of sensor applications , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[8]  W H Ko,et al.  Taped on heart rate and electrocardiogram telemetry transmitters. , 1971, JAAMI : journal of the Association for the Advancement of Medical Instrumentation.

[9]  B.J. Hosticka,et al.  A programmable intraocular CMOS pressure sensor system implant , 2001, Proceedings of the 26th European Solid-State Circuits Conference.

[10]  M R Neuman,et al.  Implant biotelemetry and microelectronics. , 1967, Science.