论文信息 - Development of PE-CVD Si/C/N:H films for tribological and corrosive complex-load conditions - 字舞流文

Development of PE-CVD Si/C/N:H films for tribological and corrosive complex-load conditions

H. Hoche | C. Berger | D. Probst | R. Riedel | Y. Zhou | E. Broszeit | H. Stafast | T. Stelzner | H. Scheerer | R. Hauser | E. Koké