Investigation into the characteristics of a-C:H films irradiated by electron beam

The characteristics of a-C:H films irradiated by different doses of electron beam have been studied by x-ray diffraction. IR absorption, Raman scattering, and resonant nuclear reaction. Such irradiation can lead the structure of a-C:H films to change in a different degree. The proportions of diamond crystalline and graphite structures in a-C:H films have a proper change simultaneously. The experimental results show a relationship to the action of hydrogen and a proper explanation is given.