Piezoelectric MEMS Power Generators for Vibration Energy Harvesting

Over the past few years, the development of wireless sensor network application has generated much interest. Research on the various ways to power wireless sensor devices has gradually become important [1-3]. Unlike portable devices such as cell phones and PDAs where the batteries can be recharged or replaced regularly, most micro sensors are powered by embedded batteries. Therefore, the life of a battery is a major constraint when trying to extend the convenience of micro sensors. With the advent of low-power electronic designs and improvements in fabrication, technology has progressed towards the possibility of selfpowered sensor nodes and micro sensors [4].

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