Design and control of a novel six-DOF maglev platform for positioning and vibration isolation

This paper presents a novel six-DOF positioning and active vibration isolation platform based on magnetic levitation principle, which is intended to be used in space or laboratory environment to obtain an ability of payload precision positioning and vibration attenuation so that a favorable environment for science experiment, precision measurement and material processing can be obtained. A maglev actuator scheme is proposed which enable the ability of six-axis motion. The transformation and dynamics model of whole system is derived. An adaptive robust sliding mode controller and a vibration filter controller combined with acceleration compensation is designed and implemented for different circumstances. Extensive simulation and experiments validate the performance of motion range and vibration isolation. Further improvements of modeling method and control algorithm are discussed as well.

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