Issues in HgCdTe Research and Expected Progress in Infrared Detector Fabrication

The purpose of this paper is to review the trends in HgCdTe research, illustrating the discussed ideas with the latest results obtained at DEFIR (CEA-LETI and Sofradir joint laboratory). The beginning of this paper is devoted to an extended introduction to today’s issues concerning HgCdTe photodiode performance enhancement. In fact, very high-quality material is mandatory for ultrahigh performance at low temperature as well as for high noise operability at high operating temperature (HOT). Therefore, a strong effort has been carried out during the last few years for lattice-matched CdZnTe substrate and HgCdTe active layer growth improvement, leading to very large substrates and ultraflat liquid-phase epitaxy layers. The same analysis holds for diode process quality and passivation. Therefore, the photodiode process has been completely revisited in order to optimize HOT operability. Also necessary for the next generation of HOT devices, some significant progress has been made in small-pixel-pitch interconnection on silicon read-out circuits. Indeed, the first 10-μm focal-plane arrays (FPAs) have been successfully fabricated this year in the mid-wave infrared (IR) band. The latest avalanche photodiode (APD) realizations are also presented with 15-μm-pitch FPAs for passive imaging and 30-μm-pitch ultrafast arrays running at 1.5 kHz full frame rate. Linear-mode photon counting using APDs is also briefly discussed. Finally, the paper concludes on more complex structures for the third generation of IR detectors, discussing the latest achievements in dual-band FPA fabrication in various spectral bands.

[1]  L. Rubaldo,et al.  Status of p-on-n HgCdTe technologies at DEFIR , 2009, Defense + Commercial Sensing.

[2]  O. Gravrand,et al.  Very long wavelength infrared detection with p-on-n LPE HgCdTe , 2012, Defense + Commercial Sensing.

[3]  Johan Rothman,et al.  Latest Developments of HgCdTe e-APDs at CEA LETI-Minatec , 2008 .

[4]  O. Gravrand,et al.  From Long Infrared to Very Long Infrared Wavelength Focal Plane Arrays Made with HgCdTe n+n−/p Ion Implantation Technology , 2007 .

[5]  F. Ma,et al.  HgCdTe electron avalanche photodiodes , 2004 .

[6]  Gérard Destefanis,et al.  Gain and Dark Current Characteristics of Planar HgCdTe Avalanche Photo Diodes , 2007 .

[7]  Philippe Tribolet,et al.  Operating temperature: a challenge for cooled IR technologies , 2010, Defense + Commercial Sensing.

[8]  Y. Reibel,et al.  Performance of Mid-Wave Infrared HgCdTe e-Avalanche Photodiodes , 2012, Journal of Electronic Materials.

[9]  O. Gravrand,et al.  Study of LWIR and VLWIR Focal Plane Array Developments: Comparison Between p-on-n and Different n-on-p Technologies on LPE HgCdTe , 2009 .

[10]  Gérard Destefanis,et al.  Infrared dual-band detectors for next generation , 2011, Defense + Commercial Sensing.

[11]  Rainer Breiter,et al.  High operating temperature IR-modules with reduced pitch for SWaP sensitive applications , 2011, Defense + Commercial Sensing.

[12]  John Marciniec,et al.  HgCdTe MWIR Back-Illuminated Electron-Initiated Avalanche Photodiode Arrays , 2007 .

[13]  James W. Beletic,et al.  H2RG focal plane array and camera performance update , 2012, Other Conferences.

[14]  Majid Zandian,et al.  MBE HgCdTe Technology: A Very General Solution to IR Detection, Described by “Rule 07”, a Very Convenient Heuristic , 2008 .

[15]  J. Rothman,et al.  Low-Frequency Noise Characteristics of HgCdTe Infrared Photodiodes Operating at High Temperatures , 2013, Journal of Electronic Materials.

[16]  Philippe Feautrier,et al.  Linear photon-counting with HgCdTe APDs , 2012, Defense, Security, and Sensing.

[17]  O. Gravrand,et al.  Ultralow-Dark-Current CdHgTe FPAs in the SWIR Range at CEA and Sofradir , 2012, Journal of Electronic Materials.

[18]  Peter Thorne,et al.  Latest detector developments with HgCdTe grown by MOVPE on GaAs substrates , 2011, Defense + Commercial Sensing.

[19]  Jean-Paul Chamonal,et al.  Impulse Response Time Measurements in Hg0.7Cd0.3Te MWIR Avalanche Photodiodes , 2008 .

[20]  Johan Rothman,et al.  History-Dependent Impact Ionization Theory Applied to HgCdTe e-APDs , 2011 .

[21]  Philippe Chorier,et al.  Infrared ROIC for very low flux and very low noise applications , 2011, Remote Sensing.