The fabrication of submicron patterns on curved substrates using a polydimethylsiloxane film mould

Submicron features have been formed on polymer-coated cylindrical and spherical substrates via hot-embossing with a polydimethylsiloxane (PDMS) film stamp, without the use of high pressure. The use of flexible PDMS moulds offers a unique advantage over conventional methods, because they cover curved substrates easily, maintaining good contact with the substrate even during the hot-embossing procedure. Using this approach, uniform submicron patterns have been easily generated on curved substrates without distortion or defect formation, eliminating the need for complex and expensive lithography processes.

[1]  R. W. Gymer,et al.  Chemical tuning of electroluminescent copolymers to improve emission efficiencies and allow patterning , 1992, Nature.

[2]  R. W. Jackson,et al.  Chemical tuning of the electronic properties of poly(p-phenylenevinylene)-based copolymers , 1993 .

[3]  Stephen Y. Chou,et al.  Imprint of sub-25 nm vias and trenches in polymers , 1995 .

[4]  G. Whitesides,et al.  Polymer microstructures formed by moulding in capillaries , 1995, Nature.

[5]  D R Walt,et al.  Photodeposition of micrometer-scale polymer patterns on optical imaging fibers , 1995, Science.

[6]  P. Colinvaux,et al.  A Long Pollen Record from Lowland Amazonia: Forest and Cooling in Glacial Times , 1996, Science.

[7]  Mona C. Wells,et al.  Interactions between Organized, Surface-Confined Monolayers and Vapor-Phase Probe Molecules. 10. Preparation and Properties of Chemically Sensitive Dendrimer Surfaces , 1996 .

[8]  A. Mau,et al.  Photochemical generation of conducting patterns in polybutadiene films , 1996 .

[9]  C. Seife.  Winning Incentives for Truthtelling , 1996, Science.

[10]  R. Crooks,et al.  Synthesis and Characterization of Surface-Grafted, Hyperbranched Polymer Films Containing Fluorescent, Hydrophobic, Ion-Binding, Biocompatible, and Electroactive Groups , 1997 .

[11]  R. Crooks,et al.  PH-SWITCHABLE, ULTRATHIN PERMSELECTIVE MEMBRANES PREPARED FROM MULTILAYER POLYMER COMPOSITES , 1997 .

[12]  G. Whitesides,et al.  Microfabrication, Microstructures and Microsystems , 1998 .

[13]  Michael D. Stewart,et al.  Patterning curved surfaces: Template generation by ion beam proximity lithography and relief transfer by step and flash imprint lithography , 1999 .

[14]  C. Willson,et al.  Step and flash imprint lithography: Template surface treatment and defect analysis , 2000 .

[15]  C. Grant Willson,et al.  Step and flash imprint lithography for sub-100-nm patterning , 2000, Advanced Lithography.

[16]  H. H. Lee,et al.  Capillary Force Lithography , 2001 .

[17]  Won Mook Choi,et al.  A soft-imprint technique for direct fabrication of submicron scale patterns using a surface-modified PDMS mold , 2003 .

[18]  Won Mook Choi,et al.  A soft-imprint technique for submicron structure fabrication via in situ polymerization , 2003 .