Three Dimensional Micro Fabrication of Photoresist and Resin Materials by Using Gray-scale Lithography and Molding
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[1] Kei Hanai,et al. A Study of Gray Scale Lithography with Micro Chrome Pattern , 2003 .
[2] G. Whitesides,et al. Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane). , 1998, Analytical chemistry.
[3] S. Takayama,et al. Use of Air-Liquid Two-Phase Flow in Hydrophobic Microfluidic Channels for Disposable Flow Cytometers , 2002 .
[4] Hans Joachim Quenzer,et al. Fabrication of microrelief surfaces using a one-step lithography process , 1997, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.
[5] Yoshinori Matsumoto,et al. 3-D Micro Machining of Photo Sensitive Glass Using Gray-Scale Mask , 2002 .
[6] S H Lee,et al. Cost-effective mass fabrication of multilevel diffractive optical elements by use of a single optical exposure with a gray-scale mask on high-energy beam-sensitive glass. , 1997, Applied optics.