Sliding Mode and PID Control of a Dual Stage Actuator for Precision Positioning

Abstract Actuators composing dual stage actuation usually have different purposes and mechanisms to complement each other. Hence, they potentially have different types of control challenges to achieve high-precision motion performance. This paper presents the use of single-input single-output controllers to efficiently overcome the potential problems by selecting proper control techniques to each actuator. The setup is a low-stiffness dual stage actuator capable of positioning with nanometer resolution without additional vibration isolation. The system consists of a CD/DVD laser pickup and a linear motor with roller bearings, which suffer from environmental vibrations and friction, respectively. By selecting and implementing a tamed PID controller for the pickup and a sliding mode controller for the linear motor, the dual stage actuator is able to move over 100 mm with a maximum velocity of 0.34 m/s and position with a static precision of ± 2.5 nm (peak-to-peak).

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