Magnetostrictive actuation in microsystems

Sputter-deposited magnetostrictive films, especially giant magnetostrictive TbFe/FeCo multilayers present a new and interesting approach to realize bending transducers as actuators in microsystems. They offer features like contactless, high-frequency operation, simple actuator designs and a cost-effective manufacturing technique. Compared to normally used amorphous rare earth (Fe,Co) single layer films this new type of multilayers shows an improved low-field magnetostriction as the magnetostrictive saturation field is reduced by approximately one order of magnitude while the saturation magnetostriction is almost unchanged. Using optimized films, Si-based bending transducers and a micropump have been realized which demonstrate the potential of giant magnetostrictive films.

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