Design, modeling, fabrication and testing of a MEMS capacitive bending strain sensor
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Mark M. Crain | William P. Hnat | John Naber | Kevin Walsh | Ji-Tzuoh Lin | Douglas J. Jackson | Julia Aebersold | Michael J. Voor | W. Hnat | M. Crain | K. Walsh | Michael D. Martin | Ji-Tzuoh Lin | D. Jackson | J. Naber | M. Voor | M. D. Martin | J. Aebersold
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