A quantitative analysis of scratch drive actuation for integrated X/Y motion system

This paper presents an X/Y stage actuated by scratch drive actuators (SDA) and processed by silicon surface machining. First a quantitative SDA analysis for X/Y motion is presented. The minimum step motion produced by the SDA have been measured as small as 25 nm. Then, feasibility of using SDA for motion of X/Y stage is established. A maximum displacement of 50 /spl mu/m along X-axis and 40 /spl mu/m along Y-axis has been demonstrated.