Design of equal precision frequency meter applied to silicon micro-resonant sensor

Aiming at the disadvantages of traditional frequency measurement,using equal precision frequency measurement principle,adopting field programmable gate array( FPGA),design and achieve equal precision frequency meter. The measured signal and standard signal in the gate time are synchronized by controlling the synchronous gate using FPGA eliminate quantization errors and improve measurement precision which doesn't change with the frequency of the measured signal in the whole measurement frequency segment,that means equal precision measurement is realized. Experimental results show that the order of magnitude of relative errors by measuring standard signals frequence adopting the designed frequency meter is 10- 6,and change of output frequency of resonant sensors is stablized in ± 1 Hz under the condition of temperature drifts,and dynamic frequency tracking under the infrared radiation is also implemented.