Micro-lens array fabricated by laser interference lithography

Micro-lens array (MLA) is a useful optic component. In this paper, we present a method to fabricate the MLA by three-beam laser interference lithography (LIL). Large area MLAs were obtained on photoresist. The MLA feature size was determined by controlling the incident angle of laser beams in LIL. The curvature of MLA was modified through the control of the post bake temperature and time or exposure dosage in LIL. It is convenient to adjust the size of the MLA in the laser interference lithography system. This method has the advantage of large area fabrication.

[1]  Osamu Shimakawa,et al.  Compact multi-core fiber fan-in/out using GRIN lens and microlens array , 2014, 2014 OptoElectronics and Communication Conference and Australian Conference on Optical Fibre Technology.

[2]  Zuobin Wang,et al.  Periodic antireflection surface structure fabricated on silicon by four-beam laser interference lithography , 2014 .

[3]  Chiara Botta,et al.  Microlens arrays for light extraction enhancement in organic light-emitting diodes: A facile approach , 2013 .

[4]  Jiangeng Xue,et al.  Enhancing light extraction in top-emitting organic light-emitting devices using molded transparent polymer microlens arrays. , 2012, Small.

[5]  Wood-Hi Cheng,et al.  Effect of grinding offset and radius of curvature on coupling efficiency of aspherical microlens for coupling high-power laser to fiber , 2012, 2012 Conference on Lasers and Electro-Optics (CLEO).

[6]  K. Leo,et al.  Highly efficient white top-emitting organic light-emitting diodes comprising laminated microlens films. , 2012, Nano letters.

[7]  W. Leung,et al.  Soft holographic interference lithography microlens for enhanced organic light emitting diode light extraction. , 2011, Optics express.

[8]  Danh Bich Do,et al.  Fabrication of ellipticity-controlled microlens arrays by controlling the parameters of the multiple-exposure two-beam interference technique. , 2011, Applied optics.

[9]  Suman Das,et al.  Large-area microlens arrays fabricated on flexible polycarbonate sheets via single-step laser interference ablation , 2010 .

[10]  Danh Bich Do,et al.  Fabrication of microlens arrays based on the mass transport effect of SU-8 photoresist using a multiexposure two-beam interference technique. , 2009, Applied optics.

[11]  Frank Wippermann,et al.  Beam homogenizers based on chirped microlens arrays. , 2007, Optics express.

[12]  M. Ares,et al.  Shack-Hartmann sensor based on a cylindrical microlens array. , 2007, Optics letters.

[13]  Ching-Kong Chao,et al.  High fill-factor microlens array mold insert fabrication using a thermal reflow process , 2004 .