Picosecond laser induced periodic surface structure on copper thin films

Abstract LIPSS (Laser Induced Periodic Surface Structure) formation on copper thin films induced by a picosecond laser beam (Nd:YAG laser at 266 nm, 42 ps and 10 Hz) was studied experimentally. Copper thin films were deposited on glass and silicon substrates by magnetron sputtering. The surface modifications of irradiated zones were analyzed by scanning electron microscopy. Two distinct types of LIPSS were identified with respect to the laser fluence (F), number of laser shots (N) and substrate material. Namely, with a number of laser shots (1000

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