论文信息 - KINEMATIC MODELING AND ANALYSIS OF A PLANAR MICRO-POSITIONER - 字舞流文

KINEMATIC MODELING AND ANALYSIS OF A PLANAR MICRO-POSITIONER

N. Dagalakis | J. Kramar | E. Amatucci | R. Bunch

[1] Nicholas G. Dagalakis,et al. Performance Evaluation of a Parallel Cantilever Biaxial Micropositioning Stage | NIST , 2000 .