Towards fully integrated Lab-on-Chip: design, assembly and experimental results

We present a direct-write CMOS-based platform for Lab-on-Chip (LoC) applications. A fully automated LoC consists of several active and passive components such as biosensors and microchannels integrated on a single chip for single purpose. In this paper, we describe a low-complexity platform consisting of capacitive biosensor and microfluidic structure. The capacitive biosensor is incorporated with nonolayers of polyelectrolyte molecules for creating sensing probes where the passive components such as microchannels are implemented through a direct-write assembly technique. We demonstrate the formation of Polyelectrolyte Sensing Layer (PSL) atop a Microfabricated Gold Electrode (MGE) and CMOS sensor using Chitosan and Alginate. This is an expanded version of a paper presented at the 3rd IEEE International Workshop on Medical Measurements and Applications, 9 10 May 2008, Ottawa, ON, Canada.

[1]  R. Guerrieri,et al.  Capacitive sensor array for localization of bioparticles in CMOS lab-on-a-chip , 2004, 2004 IEEE International Solid-State Circuits Conference (IEEE Cat. No.04CH37519).

[2]  Roberto Guerrieri,et al.  A lab-on-a-chip for cell detection and manipulation , 2003 .

[3]  Beng Kang Tay,et al.  Multilayer assembly of positively charged polyelectrolyte and negatively charged glucose oxidase on a 3D Nafion network for detecting glucose. , 2007, Biosensors & bioelectronics.

[4]  Michael F. Durstock,et al.  Dielectric Properties of Polyelectrolyte Multilayers , 2001 .

[5]  B. Bhuva,et al.  Si-based sensor for virus detection , 2005, IEEE Sensors Journal.

[6]  N. Yazdi,et al.  Noise analysis and characterization of a sigma-delta capacitive microaccelerometer , 2006, IEEE Journal of Solid-State Circuits.

[7]  Maryam Tabrizian,et al.  Biorecognition through layer-by-layer polyelectrolyte assembly: in-situ hybridization on living cells. , 2006, Biomacromolecules.

[8]  A. Hierlemann.  Integrated chemical microsensor systems in CMOS-technology , 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..

[9]  M. Sawan,et al.  Bacteria growth monitoring through an on-chip capacitive sensor , 2008, 2008 IEEE 14th International Mixed-Signals, Sensors, and Systems Test Workshop.

[10]  Benjamin Thierry,et al.  Bioactive coatings of endovascular stents based on polyelectrolyte multilayers. , 2003, Biomacromolecules.

[11]  Carlos H. Mastrangelo,et al.  Microfluidic plastic capillaries on silicon substrates: a new inexpensive technology for bioanalysis chips , 1997, Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.

[12]  Yong Liu,et al.  IC/microfluidic hybrid system for magnetic manipulation of biological cells , 2006, IEEE Journal of Solid-State Circuits.

[13]  C Guiducci,et al.  DNA detection by integrable electronics. , 2004, Biosensors & bioelectronics.

[14]  G Medoro,et al.  Microfluidic channel fabrication in dry film resist for production and prototyping of hybrid chips. , 2005, Lab on a chip.

[15]  J. Lewis,et al.  Chaotic mixing in three-dimensional microvascular networks fabricated by direct-write assembly , 2003, Nature materials.

[16]  R. Thewes,et al.  A Fully Electronic Label-Free DNA Sensor Chip , 2007, IEEE Sensors Journal.

[17]  Carlos H. Mastrangelo,et al.  Cast epoxy-based microfluidic systems and their application in biotechnology , 2004 .

[18]  Mona E. Zaghloul,et al.  Fabrication techniques to realize CMOS-compatible microfluidic microchannels , 2001 .

[19]  C. Hu,et al.  Investigation of interconnect capacitance characterization using charge-based capacitance measurement (CBCM) technique and three-dimensional simulation , 1998 .

[20]  Mohamad Sawan,et al.  A 0.18-μm CMOS capacitive sensor Lab-on-Chip , 2008 .

[21]  Francois Baleras,et al.  Fabrication of hybrid plastic-silicon microfluidic devices for individual cell manipulation by dielectrophoresis , 2003, SPIE MOEMS-MEMS.

[22]  R. Maeda,et al.  Room-temperature microfluidics packaging using sequential plasma activation process , 2006, IEEE Transactions on Advanced Packaging.

[23]  H. Craighead.  Future lab-on-a-chip technologies for interrogating individual molecules , 2006, Nature.