Modelling aspects of surface acoustic wave gas sensors

Abstract In this paper a model is presented for a surface acoustic wave (SAW) gas sensor. The model comprises the geometric design of the SAW device on a piezoelectric substrate, the electronic design of the amplifier running the SAW device and the selective film to be deposited onto the SAW device. This model has been implemented using a computer-aided engineering tool, J-Omega, for high and radio frequencies. This allows an evaluation of the sensor system prior to fabrication as well as optimization of the overall response.