论文信息 - Robust SiNx/AlGaN Interface in GaN HEMTs Passivated by Thick LPCVD-Grown SiNx Layer - 字舞流文

Robust SiNx/AlGaN Interface in GaN HEMTs Passivated by Thick LPCVD-Grown SiNx Layer

W. Luo | Sen Huang | Junfeng Li | Chao Zhao | Xinyu Liu | Xinhua Wang | K. Wei | Haojie Jiang | Yingkui Zheng | Guoguo Liu | L. Pang | T. Yuan | Xiaojuan Chen | Haoxiang Zhang