Thick-film PZT-silicon micromechanical resonator

A micromechanical silicon beam resonator in which the vibrations are driven and detected by thick-film printed piezoelectric elements is presented. Standard micromachining and thick-film processes have been successfully combined to fabricate the device. The resonator, 2 mm long and 0.52 mm wide, has a fundamental mode in air at 56.5 kHz with a Q-factor of 70.