Mechanically corner-coupled square microresonator array for reduced series motional resistance
暂无分享,去创建一个
[1] Stephen P. Timoshenko,et al. Vibration problems in engineering , 1928 .
[2] R. Oppermann. Strength of materials, part I, elementary theory and problems , 1941 .
[3] H. Nathanson,et al. The resonant gate transistor , 1967 .
[4] W. Newell. Miniaturization of tuning forks. , 1968, Science.
[5] R. Johnson. Mechanical filters in electronics , 1983 .
[6] R. Blevins,et al. Formulas for natural frequency and mode shape , 1984 .
[7] D. W. Burns,et al. Mechanical properties of fine grained polysilicon-the repeatability issue , 1988, IEEE Technical Digest on Solid-State Sensor and Actuator Workshop.
[8] Christophe Pierre,et al. Individual and interactive mechanisms for localization and dissipation in a mono-coupled nearly-periodic structure , 1993 .
[9] H. Tilmans,et al. Electrostatically driven vacuum-encapsulated polysilicon resonators part II. theory and performance , 1994 .
[10] Behzad Razavi,et al. RF Microelectronics , 1997 .
[11] R. Howe,et al. An integrated CMOS micromechanical resonator high-Q oscillator , 1999, IEEE J. Solid State Circuits.
[12] Kun Wang,et al. High-order medium frequency micromechanical electronic filters , 1999 .
[13] C. Nguyen,et al. High-Q HF microelectromechanical filters , 2000, IEEE Journal of Solid-State Circuits.
[14] Kun Wang,et al. VHF free-free beam high-Q micromechanical resonators , 2000 .
[15] Clark T.-C. Nguyen,et al. Measurement Techniques for Capacitively-Transduced VHF-to-UHF Micromechanical Resonators , 2001 .
[16] C. Nguyen,et al. Third-order intermodulation distortion in capacitively-driven CC-beam micromechanical resonators , 2001, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090).
[17] C.T.-C. Nguyen,et al. Transceiver front-end architectures using vibrating micromechanical signal processors , 2001, 2001 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems. Digest of Papers (IEEE Cat. No.01EX496).
[18] Dennis S. Greywall,et al. Coupled micromechanical drumhead resonators with practical application as electromechanical bandpass filters , 2002 .
[19] M. U. Demirci,et al. Higher-mode free-free beam micromechanical resonators , 2003, IEEE International Frequency Control Symposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, 2003. Proceedings of the 2003.
[20] Eric Beyne,et al. MEMS for wireless communications: 'from RF-MEMS components to RF-MEMS-SiP' , 2003 .
[21] F. Ayazi,et al. SOI-based HF and VHF single-crystal silicon resonators with SUB-100 nanometer vertical capacitive gaps , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).
[22] C. Nguyen,et al. Self-aligned 1.14-GHz vibrating radial-mode disk resonators , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).
[23] Clark T.-C. Nguyen,et al. Vibrating RF MEMS for next generation wireless applications , 2004, Proceedings of the IEEE 2004 Custom Integrated Circuits Conference (IEEE Cat. No.04CH37571).
[24] C. Nguyen,et al. 1.51-GHz nanocrystalline diamond micromechanical disk resonator with material-mismatched isolating support , 2004, 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest.