论文信息 - GISAXS study of defects in He implanted silicon - 字舞流文

GISAXS study of defects in He implanted silicon

G. Ottaviani | H. Amenitsch | S. Bernstorff | R. Tonini | B. Pivac | P. Dubcek | F. Corni | O. Milat | Ognjen Milat