Electromechanical analysis of electrostatic nano‐actuators using the differential quadrature method

The nonlinear analysis of nanoelectromechanical systems using the differential quadrature model is investigated. The differential quadrature method is applied to overcome the difficulty of determining the nonlinear equation of motion. The characteristics of various combinations of curved electrodes and cantilever beams are considered to optimize the design. Various nano-actuators, such as the cantilever beam actuator, are derived and simulated to examine the feasibility of applying the differential quadrature method to the nonlinear deflection in solving the nano-actuator problem. The effects of the electrode shapes, the lengths of the actuators, and the moments of inertia of the actuators on the pull-in behavior of the cantilever actuators in electrostatic nanoelectromechanical systems are investigated. The differential quadrature approach is used to generate the electrostatic field equations in matrix form. Copyright © 2007 John Wiley & Sons, Ltd.

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