Apparatus and method of inspecting a substrate

The substrate inspection device is made of the cameras arranged in a line form so as to perpendicular to the transfer part, the transport direction of the substrate above the transfer unit for transferring in a horizontal direction by fixing the substrate, the substrate in order to obtain information about the right and left teuleojim tendency of the substrate photographing the edge or cameras are overlapping the substrate at a shooting unit for shooting the whole substrate for the inspection of the substrate, the identification unit, based on the information by using the edge image of the substrate photographed in the photographing unit check the right and left teuleojim information of the substrate and to shoot without omission can be in accordance with the operation unit, and operation results of each operation the trigger signal generating timing of the camera includes a generator which generates a trigger signal of the respective camera. Therefore, it is possible to accurately record the whole of the substrate without skipping the overlapping region or area.