Terabit-per-square-inch data storage with the atomic force microscope

An areal density of 1.6 Tbits/in.2 has been achieved by anodically oxidizing titanium with the atomic force microscope (AFM). This density was made possible by (1) single-wall carbon nanotubes selectively grown on an AFM cantilever, (2) atomically flat titanium surfaces on α-Al2O3 (1012), and (3) atomic scale force and position control with the tapping-mode AFM. By combining these elements, 8 nm bits on 20 nm pitch are written at a rate of 5 kbit/s at room temperature in air.

[1]  Bo Cui,et al.  Perpendicular quantized magnetic disks with 45 Gbits on a 4×4 cm2 area , 1999 .

[2]  Thomas W. Kenny,et al.  Low‐stiffness silicon cantilevers for thermal writing and piezoresistive readback with the atomic force microscope , 1996 .

[3]  H. J. Mamin.  Thermal writing using a heated atomic force microscope tip , 1996 .

[4]  Calvin F. Quate,et al.  Nanometer‐scale hole formation on graphite using a scanning tunneling microscope , 1989 .

[5]  H. Yokoyama,et al.  Voltage Modulation Scanned Probe Oxidation , 1998, Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135).

[6]  J. Gimzewski,et al.  Manipulation of C60 molecules on Cu(111) surfaces using a scanning tunneling microscope , 1998 .

[7]  D. Eigler,et al.  Atomic and Molecular Manipulation with the Scanning Tunneling Microscope , 1991, Science.

[8]  Hongjie Dai,et al.  Exploiting the properties of carbon nanotubes for nanolithography , 1998 .

[9]  Michael T. Postek,et al.  Modification of hydrogen-passivated silicon by a scanning tunneling microscope operating in air , 1990 .

[10]  Ute Drechsler,et al.  5×5 2D AFM cantilever arrays a first step towards a Terabit storage device , 1999 .

[11]  Bruce D. Terris,et al.  Near‐field optical data storage , 1996 .

[12]  Thomas W. Kenny,et al.  Ultrahigh-density atomic force microscopy data storage with erase capability , 1999 .

[13]  Abdullah Atalar,et al.  Nanometer-scale patterning and individual current-controlled lithography using multiple scanning probes , 1999 .

[14]  E. Snow,et al.  Fabrication of Si nanostructures with an atomic force microscope , 1994 .

[15]  H. Sugimura,et al.  Scanning Tunneling Microscope Tip-Induced Anodization for Nanofabrication of Titanium , 1994 .

[16]  K. Matsumoto.  STM/AFM nano-oxidation process to room-temperature-operated single-electron transistor and other devices , 1997, Proc. IEEE.