Multi-Probe Atomic Force Microscopy Using Piezoelectric Cantilevers

We developed a multi-probe atomic force microscopy (AFM) system using piezoelectric thin film (PZT) cantilevers. The use of self-sensing cantilevers with integrated deflection sensors as probes markedly reduced complexity in the ordinary AFM setup. Address-patterned samples having microfabricated x–y coordinate patterns, fabricated by electron beam lithography, were developed as well. These samples allow us to evaluate the relative distance between the probes by the comparison of the images obtained. Although the minimum distance between these probes was 126 µm using the original cantilevers, it was reduced to 9.2 µm by using the PZT cantilevers modified by a focused ion beam. Furthermore, we found that the interaction forces between the cantilevers were detected by determining the change in the amplitude of each cantilever.

[1]  Y. Martin,et al.  Magnetic imaging by ‘‘force microscopy’’ with 1000 Å resolution , 1987 .

[2]  K. Matsushige,et al.  Local Surface Potential Measurements of Carbon Nanotube FETs by Kelvin Probe Force Microscopy , 2005 .

[3]  S. Kitamura,et al.  Observation of 7×7 Reconstructed Structure on the Silicon (111) Surface using Ultrahigh Vacuum Noncontact Atomic Force Microscopy , 1995 .

[4]  M. Aono,et al.  Epitaxially grown WOx nanorod probes for sub-100nm multiple-scanning-probe measurement , 2006 .

[5]  D. Rugar,et al.  Frequency modulation detection using high‐Q cantilevers for enhanced force microscope sensitivity , 1991 .

[6]  C. Frisbie,et al.  Gate voltage dependent resistance of a single organic semiconductor grain boundary , 2001 .

[7]  Kei Kobayashi,et al.  True atomic resolution in liquid by frequency-modulation atomic force microscopy , 2005 .

[8]  Wataru Yashiro,et al.  A probe-positioning method with two-dimensional calibration pattern for micro-multi-point probes , 2003 .

[9]  Tadaaki Nagao,et al.  Independently driven four-tip probes for conductivity measurements in ultrahigh vacuum , 2001 .

[10]  M. Aono,et al.  Materials science: Nanoscale control of chain polymerization , 2001, Nature.

[11]  H. K. Wickramasinghe,et al.  Kelvin probe force microscopy , 1991 .

[12]  T. Itoh,et al.  Self-excited piezoelectric PZT microcantilevers for dynamic SFM—with inherent sensing and actuating capabilities , 1999 .

[13]  E. Betzig,et al.  Near-Field Optics: Microscopy, Spectroscopy, and Surface Modification Beyond the Diffraction Limit , 1992, Science.

[14]  Hiroshi Itoh,et al.  Analog frequency modulation detector for dynamic force microscopy , 2001 .

[15]  Toru Fujii,et al.  Feedback positioning cantilever using lead zirconate titanate thin film for force microscopy observation of micropattern , 1996 .

[16]  Gilles Horowitz,et al.  Grain size dependent mobility in polycrystalline organic field-effect transistors , 2001 .

[17]  Iwao Matsuda,et al.  Anisotropy in conductance of a quasi-one-dimensional metallic surface state measured by a square micro-four-point probe method. , 2003, Physical review letters.

[18]  S. Hasegawa,et al.  In situ resistance measurements of epitaxial cobalt silicide nanowires on Si(110) , 2005 .

[19]  Masakazu Aono,et al.  Construction of Independently Driven Double-Tip Scanning Tunneling Microscope , 2005 .

[20]  Masashi Kitazawa,et al.  Batch Fabrication of Sharpened Silicon Nitride Tips , 2003 .

[21]  Toshio Ando,et al.  High-Speed Atomic Force Microscopy for Studying the Dynamic Behavior of Protein Molecules at Work , 2006 .

[22]  G. Binnig,et al.  Tunneling through a controllable vacuum gap , 1982 .