Double-side-coated nanomechanical membrane-type surface stress sensor (MSS) for one-chip-one-channel setup.
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M. Aono | N. D. de Rooij | P. Vettiger | T. Nakayama | T. Akiyama | G. Yoshikawa | F. Loizeau | K. Shiba | Cory J Y Lee | S. Gautsch