论文信息 - 3D-Printed Optics for Wafer-Scale Probing

3D-Printed Optics for Wafer-Scale Probing

Mass production of photonic integrated circuits requires high-throughput wafer-level testing. We demonstrate that optical probes equipped with 3D-printed elements allow for efficient coupling of light to etched facets of nanophotonic waveguides. The technique is widely applicable to different integration platforms.

[1] Hans Sohlström,et al. High efficiency silicon nitride surface grating couplers. , 2008, Optics express.

[2] Michal Lipson,et al. Wafer-scale High-Density Edge Coupling for High Throughput Testing of Silicon Photonics , 2018, 2018 Optical Fiber Communications Conference and Exposition (OFC).

[3] A. Tünnermann,et al. Wave-optical modeling beyond the thin-element-approximation. , 2016, Optics express.

[4] R. Baets,et al. Compact efficient broadband grating coupler for silicon-on-insulator waveguides. , 2004, Optics letters.

[5] R Orobtchouk,et al. Silicon Photonic Circuits: On-CMOS Integration, Fiber Optical Coupling, and Packaging , 2011, IEEE Journal of Selected Topics in Quantum Electronics.

[6] Jens H. Schmid,et al. Roadmap on silicon photonics , 2016 .

[7] W. Freude,et al. In situ 3D nanoprinting of free-form coupling elements for hybrid photonic integration , 2018 .

[8] B. Corbett,et al. Practical Design of Lensed Fibers for Semiconductor Laser Packaging Using Laser Welding Technique , 2009, Journal of Lightwave Technology.