论文信息 - Introduction of an Al Seed Layer for Facile Adsorption of MoCl5 during Atomic Layer Deposition of MoS2 - 字舞流文

Introduction of an Al Seed Layer for Facile Adsorption of MoCl5 during Atomic Layer Deposition of MoS2

Hyoungsub Kim | Kyung‐Eun Byun | Eunha Lee | Yeonchoo Cho | Hyeon-Jin Shin | Hyangsook Lee | Hoijoon Kim | Mirine Leem | Taejin Park | W. Ahn | Hee-Gyeun Lee | Hyoungsub Kim | Heesoo Lee