论文信息 - Relaxed template for fabricating regularly distributed quantum dot arrays

Relaxed template for fabricating regularly distributed quantum dot arrays

Relaxed SiGe thin films are used as templates to control the nucleation of three-dimensional Ge islands on Si(100) substrates. Using the relaxed template, Ge islands form a rectangular array with all islands located exclusively above the intersections of dislocations. The registration is lost when the Ge growth temperature is lowered to 300 °C, and the Ge coverage is decreased to 0.4 nm.

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