论文信息 - Oxidation-Induced Changes in the ALD-Al2O3/InAs(100) Interface and Control of the Changes for Device Processing. - 字舞流文

Oxidation-Induced Changes in the ALD-Al2O3/InAs(100) Interface and Control of the Changes for Device Processing.

K. Kokko | J. Mäkelä | M. Tuominen | M. Yasir | M. Punkkinen | P. Laukkanen | V. Polojärvi | A. Tukiainen | M. Guina | R. Félix | J. Lyytikäinen | R. Punkkinen | M. Laitinen | J. Dahl | S. Granroth | M. Kuzmin | Hannu-Pekka Hedman | J. Lehtiö