论文信息 - Supercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films - 字舞流文

Supercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films

P. Rice | Ho-Cheol Kim | M. Toney | S. Gangopadhyay | J. Lubguban | T. Rajagopalan | J. Sun | E. Huang | W. Volksen | Ding-hai Huang | R. D. Miller | A. Mallikarjunan | N. Biswas | S. Simon | E. Delenia | B. Lahlouh