The enhanced model-free control of nano-positioning stage

An efficient control of nano-positioning stage remains a challenging task due to the effect of noise and disturbances and nonlinear friction phenomenon which is difficult for both modeling and control. In order to solve this problem, a novel model-free control method is applied to nano-positioning stage to provide the robustness and ability of disturbance rejection. Besides, a feedforward model which can predict the required force for pre-sliding regime is added to cancel the nonlinear pre-sliding friction and reduce the control effort. The simulation and experiment results shows, with this simple control structure, the excellent tracking accuracy and insensitivity to disturbance are achieved.

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