论文信息 - Chemical bonding structures of silicon oxynitride films grown by ionised N2 and pure O2 gas mixtures at low temperature - 字舞流文

Chemical bonding structures of silicon oxynitride films grown by ionised N2 and pure O2 gas mixtures at low temperature

H. Yun | M. Jung | J. Lee | K. Park | J. Lee | M.S. Han | Kyung-Duk Park | K. Ahn | C.-J. Choi | C. Choi