论文信息 - Accuracy in integrated circuit dimensional measurements

Accuracy in integrated circuit dimensional measurements

The measurement of critical dimensions of features on integrated circuits and photomasks is modeled as the comparison of the images of the test object and of a standard object in a measuring device. A length measuring instrument is then a comparator. The calibration of the standard and the conditions necessary for a valid comparison are discussed. The principles discussed here apply to many other types of measurement as well.

James E. Potzick

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