论文信息 - Fabrication of Helically Perforated Thin Films - 字舞流文

Fabrication of Helically Perforated Thin Films

K. Harris | M. Brett | K. Westra

[1] F. Roozeboom,et al. Etching of Deep Macropores in 6 in. Si Wafers , 2000 .

[2] M. Brett,et al. Fabrication of submicrometer regular arrays of pillars and helices , 1999 .

[3] Susumu Noda,et al. SPIRAL THREE-DIMENSIONAL PHOTONIC-BAND-GAP STRUCTURE , 1998 .

[4] M. J. Brett,et al. Sculptured thin films and glancing angle deposition: Growth mechanics and applications , 1997 .

[5] M. J. Brett,et al. Chiral sculptured thin films , 1996, Nature.

[6] U. Gösele,et al. Polycrystalline and monocrystalline pore arrays with large interpore distance in anodic alumina , 1999 .