The design, fabrication, and testing of corrugated silicon nitride diaphragms
暂无分享,去创建一个
[1] H. Sandmaier,et al. Stress free assembly technique for a silicon based pressure sensor , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.
[2] Reimund Gerhard-Multhaupt,et al. Silicon‐dioxide electret transducer , 1984 .
[3] T. Bourouina,et al. A new condenser microphone with a p+ silicon membrane , 1992 .
[4] Miko Elwenspoek,et al. Resonating microbridge mass flow sensor , 1990 .
[5] K. Wise,et al. Performance of nonplanar silicon diaphragms under large deflections , 1994 .
[6] Piet Bergveld,et al. PECVD silicon nitride diaphragms for condenser microphones , 1991 .
[7] X. Ding. Behavior and application of silicon diaphragms with a boss and corrugations , 1992, Technical Digest IEEE Solid-State Sensor and Actuator Workshop.
[8] H. Fujita,et al. Large deflection performance of surface micromachined corrugated diaphragms , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.
[9] Miko Elwenspoek,et al. On-chip decoupling zone for package-stress reduction , 1991 .
[10] R. Mountain,et al. A technique for the determination of stress in thin films , 1983 .
[11] Jan H. J. Fluitman,et al. Realization of mechanical decoupling zones for package-stress reduction , 1993 .
[12] Mario Di Giovanni,et al. Flat and Corrugated Diaphragm Design Handbook , 1982 .
[13] Gisela Hess,et al. A subminiature condenser microphone with silicon nitride membrane and silicon back plate , 1989 .
[14] D. Ciarlo,et al. A Fabry-Perot microinterferometer for visible wavelengths , 1992, Technical Digest IEEE Solid-State Sensor and Actuator Workshop.
[15] F. Parodi,et al. A silicon condenser microphone with a highly perforated backplate , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.
[16] Kensall D. Wise,et al. Performance of non-planar silicon diaphragms under large deflections , 1993, [1993] Proceedings IEEE Micro Electro Mechanical Systems.
[17] A. J. Sprenkels,et al. Development of an electret microphone in silicon , 1989 .
[18] Michael Curt Elwenspoek,et al. Membranes fabricated with a deep single corrugation for package stress reduction and residual stress relief , 1993 .
[19] S. R. Mallinson,et al. A miniature Fabry-Perot interferometer with a corrugated silicon diaphragm support , 1990, IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop.
[20] W. Kühnel,et al. Micromachined subminiature condenser microphones in silicon , 1992 .
[21] S. R. Mallinson,et al. A miniature Fabry-Perot interferometer with a corrugated silicon diaphragm support , 1991 .
[22] J. H. Jerman. The fabrication and use of micromachined corrugated silicon diaphragms , 1990 .