论文信息 - Kinetics of nitrogen incorporation at the SiO2/4H-SiC interface during an NO passivation - 字舞流文

Kinetics of nitrogen incorporation at the SiO2/4H-SiC interface during an NO passivation

S. Dhar | L. Feldman | T. Buyuklimanli | W. Ou | E. Garfunkel | Yi Xu | A. Wan | Zengjun Chen | J. Serfass