High-quality heterojunction between p-type diamond single-crystal film and n-type cubic boron nitride bulk single crystal

We presented the results on the fabrication and characterization of high-quality heterojunction between p-type diamond single-crystalline film and n-type cubic boron nitride (c-BN) bulk single crystal. By employing a simple surface diffusion, we prepared the n-type c-BN bulk single crystals with relatively low resistivity (1.0×10−1 Ω cm). Combining p-type diamond films grown by chemical vapor deposition with n-type c-BN, we fabricated a high-quality heterojunction bipolar p–n diode, which the turn-on voltage of the heterojunction was 0.85 V, and the current density reached to 170 A/m2 when the forward bias was applied to 3 V.

[1]  R. H. Wentorf Preparation of Semiconducting Cubic Boron Nitride , 1962 .

[2]  S. Yamaoka,et al.  High-Temperature Cubic Boron Nitride P-N Junction Diode Made at High Pressure , 1987, Science.

[3]  Junzo Tanaka,et al.  Ultraviolet light‐emitting diode of a cubic boron nitride pn junction made at high pressure , 1988 .

[4]  Daniel C. Harris,et al.  Characterization of diamond films by thermogravimetric analysis and infrared spectroscopy , 1989 .

[5]  B. Segall,et al.  Electronic structure of (diamond C)/(sphalerite BN) (110) interfaces and superlattices. , 1989, Physical review. B, Condensed matter.

[6]  M. Wong,et al.  Tribological properties of diamond films grown by plasma‐enhanced chemical vapor deposition , 1989 .

[7]  D. Schroder Semiconductor Material and Device Characterization , 1990 .

[8]  S. Koizumi,et al.  Study of crystallographic orientations in the diamond film on cubic boron nitride using Raman microprobe , 1990 .

[9]  T. DebRoy,et al.  Oxidation of diamond films synthesized by hot filament assisted chemical vapor deposition , 1990 .

[10]  Kazuhiro Suzuki,et al.  Epitaxial growth of diamond thin films on cubic boron nitride {111} surfaces by dc plasma chemical vapor deposition , 1990 .

[11]  G. Rossman,et al.  Observation of surface charge screening and Fermi level pinning on a synthetic, boron‐doped diamond , 1993 .

[12]  S. Shikata,et al.  Cross-Sectional Transmission Electron Microscopy Observations and Selected-Area Electron Diffractions of Interfaces of Epitaxially Grown Diamond Thin Films on Cubic Boron Nitride Substrates , 1993 .

[13]  W. M. Clift,et al.  Diamond deposition on polycrystalline films of cubic boron nitride , 1993 .

[14]  A. Argoitia,et al.  Heteroepitaxy of diamond on c-BN: Growth mechanisms and defect characterization , 1994 .

[15]  S. Shikata,et al.  p-n Junction diode by B-doped diamond heteroepitaxially grown on Si-doped c-BN , 1994 .

[16]  Gary L. Doll,et al.  Observation of a negative electron affinity for boron nitride , 1995 .

[17]  Ishii,et al.  Resonant photoemission study on the boron 1s exciton of the wide-band-gap semiconductor c-BN. , 1995, Physical review. B, Condensed matter.

[18]  Hajime Haneda,et al.  Sulfur: A donor dopant for n-type diamond semiconductors , 1999 .

[19]  R. Kalish,et al.  Is sulfur a donor in diamond , 2000 .

[20]  F. Fontaine Holes in boron-doped diamond: comparison between experiment and an improved model , 2000 .

[21]  Isao Sakaguchi,et al.  Sulfur-doped homoepitaxial (001) diamond with n-type semiconductive properties , 2000 .

[22]  V. Ralchenko,et al.  Microstructural characterization of diamond films deposited on c-BN crystals , 2000 .

[23]  Yoichiro Sato,et al.  Homoepitaxial diamond growth with sulfur-doping by microwave plasma-assisted chemical vapor deposition , 2001 .

[24]  Florian Maier,et al.  Electron affinity of plasma-hydrogenated and chemically oxidized diamond (100) surfaces , 2001 .

[25]  Kenji Watanabe,et al.  Ultraviolet Emission from a Diamond pn Junction , 2001, Science.

[26]  He Guo-min,et al.  Stability and electronic structures of the polar diamond/boron-nitride(001) interface , 2001 .

[27]  Gareth M. Fuge,et al.  Sulfur doping of diamond films: Spectroscopic, electronic, and gas-phase studies , 2002 .

[28]  Han Yong-hao,et al.  Preparation of p-n Junction Diode by B-Doped Diamond Film Grown on Si-Doped c-BN , 2002 .

[29]  P. May,et al.  In situ plasma diagnostics of the chemistry behind sulfur doping of CVD diamond films , 2002 .

[30]  M. Stutzmann,et al.  n-Type doping of diamond by sulfur and phosphorus , 2002 .

[31]  J. Angus,et al.  Sulfur-Doped n-Type Diamond: Preparation and Electrochemical Properties , 2003 .