Towards new precursors for ZnO thin films by single source CVD: the X-ray structures and precursor properties of zinc ketoacidoximates

Zinc complexes of pyruvic and glyoxylic acid oximes have been investigated as potential precursors for single source chemical vapour deposition (SSCVD) of ZnO thin films. The X-ray crystal structures of the complexes and of their –NOMe analogues reveal markedly different coordination and intermolecular bonding patterns. These structural differences, in conjunction with ligand substituent changes impart different responses to thermogravimetric analysis (TGA), and sublimation. The glyoxylic acid methyloxime Zn(O2CCHN(OMe))2 · 2H2O has volatility and thermolysis properties suitable for SSCVD of ZnO.

[1]  K. Nonomura,et al.  Cathodic electrodeposition of oxide semiconductor thin films and their application to dye-sensitized solar cells , 2002 .

[2]  E. Budianu,et al.  Heterojunction with ZnO polycrystalline thin films for optoelectronic devices applications , 2000 .

[3]  Z. Ye,et al.  Synthesis and properties of ZnO films with (1 0 0) orientation by SS-CVD , 2003 .

[4]  A. Apblett,et al.  Low-Temperature Precursors for Titanium Oxide , 1994 .

[5]  J. Mague,et al.  SYNTHESIS AND SPECTROSCOPIC AND THERMAL DECOMPOSITION STUDIES OF ALKALI METAL SALTS OF 2-OXIMIDOPROPIONATE , 1997 .

[6]  R. Lamb,et al.  Structural Order of Nanocrystalline ZnO Films , 1999 .

[7]  K Schulten,et al.  VMD: visual molecular dynamics. , 1996, Journal of molecular graphics.

[8]  Y. Qian,et al.  Synthesis of metal and metal oxide nanocrystallines by pyrolysis of metal complex , 2001 .

[9]  A. Petrella,et al.  Single-Source Chemical Vapor Deposition Growth of ZnO Thin Films Using Zn4O(CO2NEt2)6 , 2002 .

[10]  I. D. Spenser,et al.  THE CONVERSION OF α-KETO ACIDS AND OF α-KETO ACID OXIMES TO NITRILES IN AQUEOUS SOLUTION , 1961 .

[11]  R. Lamb,et al.  Factors influencing the chemical vapor deposition of oriented ZnO films using zinc acetate , 1995 .

[12]  D. E. Shaw,et al.  Mass spectra of tetracobalt(II) and tetrazinc(II) μ4-oxo-hexa-μ-carboxylates (basic cobalt and zinc carboxylates) , 1975 .

[13]  Clément Sanchez,et al.  Oriented ZnO thin films synthesis by sol–gel process for laser application , 2003 .

[14]  E. Budianu,et al.  ZnO thin films on semiconductor substrate for large area photodetector applications , 2001 .