Clamping properties investigation in micro/nano scale experimental mechanics

Creation of strong clamping or gripping becomes a crucial issue in micro and nano scale mechanical experiments. In this paper, several kinds of clamping in micro/nano scale experiments are investigated and compared. Topics include the clamping based on the electron-beam-induced deposition (EBID), the van der Waals interaction, the capillary force, and the electrostatic attractive interaction. The clamping strength and mechanism are analyzed both theoretically and experimentally. The influence of the relative humidity on the micro/nano scale clamping is discussed. The clamping strengths and performances of different clamping methods are also compared considering the size and the material of the clamped objects, and the application environments.

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